{"id":2768,"date":"2017-04-26T19:53:36","date_gmt":"2017-04-26T11:53:36","guid":{"rendered":"\/\/www.progesta-pro.com\/?p=2768"},"modified":"2017-04-26T22:40:32","modified_gmt":"2017-04-26T14:40:32","slug":"%e7%a2%b3%e9%a2%97%e7%b2%92%e7%87%83%e7%83%a7%e6%96%b0%e5%9e%8b%e5%82%ac%e5%8c%96%e5%89%82-%e5%a4%a7%e5%ad%94%e8%8e%ab%e6%9d%a5%e7%9f%b3","status":"publish","type":"post","link":"\/\/www.progesta-pro.com\/archives\/2768","title":{"rendered":"\u78b3\u9897\u7c92\u71c3\u70e7\u65b0\u578b\u50ac\u5316\u5242-\u5927\u5b54\u83ab\u6765\u77f3"},"content":{"rendered":"<p>\u968f\u7740\u4eba\u4eec\u751f\u6d3b\u6c34\u5e73\u7684\u63d0\u5347\uff0c\u6c7d\u8f66\u4e5f\u9010\u6e10\u6210\u4e3a\u5bfb\u5e38\u767e\u59d3\u5bb6\u7684\u521a\u9700\u4ea7\u54c1\uff0c\u8fd9\u662f\u65f6\u4ee3\u8fdb\u6b65\u7684\u6807\u5fd7\u4e4b\u4e00\u3002\u6c7d\u8f66\u7684\u786e\u4e3a\u4eba\u4eec\u7684\u51fa\u884c\u5e26\u6765\u4fbf\u5229\uff0c\u4f46\u4e0e\u6b64\u540c\u65f6\uff0c\u7531\u5b83\u4ea7\u751f\u7684\u73af\u5883\u6c61\u67d3\u95ee\u9898\u4e0d\u5bb9\u5c0f\u89d1\u3002\u8fd1\u51e0\u5e74\u56e0\u5c3e\u6c14\u6392\u653e\u5f15\u53d1\u7684\u7a7a\u6c14\u6c61\u67d3\u95ee\u9898\u65e5\u76ca\u4e25\u91cd\uff0c\u5168\u56fd\u591a\u5730\u96fe\u973e\u9891\u53d1\uff0c\u8fd9\u5f15\u8d77\u4e86\u793e\u4f1a\u5927\u4f17\u7684\u666e\u904d\u5173\u6ce8\uff0c\u4e5f\u6210\u4e3a\u4e86\u653f\u5e9c\u76f8\u5173\u90e8\u95e8\u7684\u5de5\u4f5c\u91cd\u70b9\u4e4b\u4e00\u3002\u5173\u4e8e\u7a7a\u6c14\u6c61\u67d3\u7684\u5904\u7406\uff0c\u9897\u7c92\u6c61\u67d3\u7269\u5c06\u6210\u4e3a\u95ee\u9898\u6838\u5fc3\u3002\u800c\u9897\u7c92\u6c61\u67d3\u7269\u7684\u4e3b\u8981\u6765\u6e90\u4e4b\u4e00\u5c31\u662f\u67f4\u6cb9\u8f66\u5c3e\u6c14\u4e2d\u7684\u78b3\u9897\u7c92\uff0c\u5904\u7406\u8fd9\u4e00\u6c61\u67d3\u6e90\u5e38\u7528\u7684\u6280\u672f\u662f\u78b3\u9897\u7c92\u6355\u96c6\u6280\u672f\uff08DPF\uff09\u3002DPF\u6280\u672f\u662f\u5c06\u5c3e\u6c14\u4e2d\u78b3\u9897\u7c92\u6536\u96c6\u5230\u6d82\u6577\u6709\u50ac\u5316\u5242\u7684\u6ee4\u7f51\u8868\u9762\u518d\u5728\u9ad8\u6e29\u4e0b\u5c06\u5176\u71c3\u70e7\u4ee5\u53bb\u9664\u7684\u6280\u672f\u3002\u4f20\u7edf\u7684\u50ac\u5316\u5242\u4ee5\u94c2\u8d35\u91d1\u5c5e\u4e3a\u4e3b\uff0c\u4ef7\u683c\u6602\u8d35\u4e14\u9ad8\u6e29\u7a33\u5b9a\u6027\u5dee\uff0c\u56e0\u6b64\uff0c\u5bfb\u627e\u4ef7\u683c\u4f4e\u5ec9\uff0c\u6027\u80fd\u4f18\u5f02\u7684\u9ad8\u6027\u4ef7\u6bd4\u50ac\u5316\u5242\u662f\u73b0\u9636\u6bb5\u7814\u7a76\u7684\u70ed\u70b9\u4e4b\u4e00\u3002<\/p>\n<p>\u9530\u57fa\u83ab\u6765\u77f3\u6c27\u5316\u7269\uff08SmMn2O5\uff09\u5177\u6709\u5f88\u597d\u7684\u6c27\u5316\u50ac\u5316\u6027\u80fd\uff0c\u6700\u521d\u5e94\u7528\u4e8e\u5c06\u4e00\u6c27\u5316\u6c2e\u8f6c\u5316\u4e3a\u4e8c\u6c27\u5316\u6c2e\u7684\u8fc7\u7a0b\u4e2d\uff0c\u76f8\u5173\u6210\u679c\u57282012\u5e74\u53d1\u8868\u4e8e\u300a\u79d1\u5b66\u300b\u6742\u5fd7\uff08\u5148\u8fdb\u6750\u6599\u8bbe\u8ba1\u5b9e\u9a8c\u5ba4\u5355\u658c\u6559\u6388\u4e3a\u4f5c\u8005\u4e4b\u4e00\uff09\u3002\u7136\u800c\uff0c\u5171\u6c89\u6dc0\u6cd5\u5236\u5907\u7684\u9530\u57fa\u83ab\u6765\u77f3\u6c27\u5316\u7269\u662f\u5448\u56e2\u805a\u72b6\u7684\u7eb3\u7c73\u9897\u7c92\uff0c\u5185\u90e8\u5b54\u9699\u5f88\u5c0f\uff0c\u78b3\u9897\u7c92\uff08&gt;25nm\uff09\u5bb9\u6613\u6c89\u79ef\u81f3\u50ac\u5316\u5242\u8868\u9762\uff0c\u4ece\u800c\u51cf\u5c11\u78b3\u9897\u7c92-\u50ac\u5316\u5242-\u53cd\u5e94\u6c14\u7684\u4e09\u76f8\u63a5\u89e6\u754c\u9762\uff0c\u6291\u5236\u4e86\u78b3\u9897\u7c92\u71c3\u70e7\u7684\u50ac\u5316\u6d3b\u6027\uff0c\u63d0\u9ad8\u4e86\u78b3\u9897\u7c92\u71c3\u70e7\u7684\u6e29\u5ea6\u3002\u4e3a\u4e86\u589e\u5927\u78b3\u9897\u7c92-\u50ac\u5316\u5242-\u53cd\u5e94\u6c14\u7684\u4e09\u76f8\u63a5\u89e6\u9762\u79ef\uff0c\u8fdb\u4e00\u6b65\u964d\u4f4e\u78b3\u9897\u7c92\u71c3\u70e7\u6e29\u5ea6\uff0c\u5355\u658c\u6559\u6388\u5728\u7814\u7a76\u4e2d\u9009\u53d6\u4e86\u591a\u79cd\u65b9\u5f0f\u8c03\u63a7\u83ab\u6765\u77f3\u578b\u6c27\u5316\u7269\u7684\u5f62\u8c8c\uff0c\u5176\u4e2d\u91c7\u7528\u4e59\u4e8c\u9187-\u7532\u9187\u6709\u673a\u6eb6\u6db2\u71c3\u70e7\u6cd5\u5236\u5907\u51fa\u7684\u9530\u57fa\u83ab\u6765\u77f3\u6c27\u5316\u7269\u5177\u6709\u5185\u90e8\u8054\u901a\u5927\u5b54\u7ed3\u6784\uff08&gt;50nm\uff09\uff0c\u53ef\u4ee5\u6709\u6548\u9632\u6b62\u78b3\u9897\u7c92\u5728\u50ac\u5316\u5242\u8868\u9762\u56e2\u805a\u5806\u79ef\uff0c\u4ece\u800c\u62e5\u6709\u66f4\u591a\u7684\u6c14\u4f53-\u78b3\u9897\u7c92-\u50ac\u5316\u5242\u4e09\u76f8\u63a5\u89e6\u4f4d\u70b9\uff0c\u5373\u53cd\u5e94\u6d3b\u6027\u4f4d\u66f4\u591a\uff0c\u56e0\u800c\u8868\u73b0\u51fa\u6700\u4f18\u50ac\u5316\u6d3b\u6027\u3002<\/p>\n<p>&nbsp;<\/p>\n<p><a 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