{"id":6981,"date":"2023-08-03T13:34:13","date_gmt":"2023-08-03T05:34:13","guid":{"rendered":"\/\/www.progesta-pro.com\/?p=6981"},"modified":"2023-08-07T15:03:17","modified_gmt":"2023-08-07T07:03:17","slug":"nature-communications-%e9%80%89%e6%8b%a9%e6%80%a7%e5%8e%9f%e5%ad%90%e5%b1%82%e6%b2%89%e7%a7%af%e5%8a%a9%e5%8a%9b%e9%9b%86%e6%88%90%e7%94%b5%e8%b7%af%e5%85%88%e8%bf%9b%e5%88%b6%e7%a8%8b%e9%ab%98","status":"publish","type":"post","link":"\/\/www.progesta-pro.com\/archives\/6981","title":{"rendered":"<strong>Nature communications | \u9009\u62e9\u6027\u539f\u5b50\u5c42\u6c89\u79ef\u52a9\u529b\u96c6\u6210\u7535\u8def\u5148\u8fdb\u5236\u7a0b\u9ad8\u7cbe\u5ea6\u81ea\u5bf9\u51c6\u5236\u9020\u5de5\u827a<\/strong>"},"content":{"rendered":"\n<p>\u968f\u7740\u96c6\u6210\u7535\u8def\u5236\u9020\u6280\u672f\u7684\u53d1\u5c55\u548c\u5e02\u573a\u9700\u6c42\uff0c\u82af\u7247\u7279\u5f81\u5c3a\u5bf8\u7f29\u5c0f\uff0c\u4e92\u8fde\u5bc6\u5ea6\u8fdb\u4e00\u6b65\u63d0\u5347\uff0c\u82af\u7247\u7684\u81ea\u5bf9\u51c6\u5236\u9020\u9700\u4f9d\u8d56\u591a\u6b21\u6c89\u79ef-\u5149\u523b-\u523b\u8680\u7684\u590d\u6742\u6d41\u7a0b\uff0c\u6b65\u9aa4\u591a\u6210\u672c\u9ad8\uff0c\u4e14\u7531\u5957\u523b\u8bef\u5dee\u5f15\u8d77\u76f8\u90bb\u91d1\u5c5e\u5bfc\u7ebf\u6f0f\u7535\u77ed\u8def\u3002\u534e\u4e2d\u79d1\u6280\u5927\u5b66\u7814\u7a76\u56e2\u961f\u63d0\u51fa\u4e86\u4e00\u79cd\u201c\u5316\u7e41\u4e3a\u7b80\u201d\u7684\u9ad8\u7cbe\u5ea6\u81ea\u5bf9\u51c6\u6c89\u79ef\u7684\u89e3\u51b3\u65b9\u6848\uff0c\u4ed6\u4eec\u901a\u8fc7\u9009\u62e9\u6027\u539f\u5b50\u5c42\u6c89\u79ef\u6280\u672f\uff08Selective Atomic layer deposition\uff09\uff0c<strong>\u5b9e\u73b0\u76ee\u6807\u4ecb\u7535\u5c42\u5728\u5e95\u90e8\u4ecb\u7535\u5c42\u7684\u81ea\u5bf9\u51c6\u751f\u957f\uff0c\u800c\u5728\u975e\u751f\u957f\u533a\u91d1\u5c5e\u94dc\u8868\u9762\u4e0d\u751f\u957f\u3002<\/strong>\u8be5\u5de5\u827a\u5728\u751f\u957f\u533a\u8fbe\u52305\u7eb3\u7c73\u539a\u5ea6\uff0c\u975e\u751f\u957f\u533a\u4e0d\u751f\u957f\uff0c\u9009\u62e9\u6027\u8fbe\u5230100%\uff0c\u5b9e\u73b0\u8584\u819c\u9ad8\u7cbe\u5ea6\u81ea\u5bf9\u51c6\u6c89\u79ef\u3002\u5bf9\u4e8e\u82af\u7247\u5148\u8fdb\u5236\u7a0b\u6765\u8bf4\uff0c\u53ef\u4ee5\u63d0\u5347\u5bf9\u51c6\u7cbe\u5ea6\u3001\u51cf\u5c11\u5149\u523b-\u523b\u8680\u6b65\u9aa4\u3001\u63d0\u5347\u82af\u7247\u5236\u7a0b\u826f\u7387\u7b49\u65b9\u9762\u90fd\u5177\u6709\u4f18\u52bf\u3002\uff08\u56fe1\uff09<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><a href=\"\/\/www.progesta-pro.com\/wp-content\/uploads\/2023\/08\/image.png\" class=\"pirobox_gall\"><img loading=\"lazy\" decoding=\"async\" width=\"554\" height=\"255\" src=\"\/\/www.progesta-pro.com\/wp-content\/uploads\/2023\/08\/image.png\" alt=\"\" class=\"wp-image-6982\" srcset=\"\/\/www.progesta-pro.com\/wp-content\/uploads\/2023\/08\/image.png 554w, \/\/www.progesta-pro.com\/wp-content\/uploads\/2023\/08\/image-300x138.png 300w\" sizes=\"(max-width: 554px) 100vw, 554px\" \/><\/a><figcaption class=\"wp-element-caption\">\u56fe1\u81ea\u5bf9\u51c6\u6c89\u79ef\u56fe\u6848\u5316\u8584\u819c\u6280\u672f\u8def\u7ebf\uff0c\u9009\u62e9\u6027\u6c89\u79ef\u6709\u6548\u51cf\u5c11\u4e86\u591a\u6b21\u5149\u523b\u4e0e\u523b\u8680\u7684\u590d\u6742\u6b65\u9aa4\uff0c\u5e76\u63d0\u5347\u4e86\u81ea\u5bf9\u51c6\u7cbe\u5ea6\uff08\u6765\u6e90\uff1a<a href=\"https:\/\/protocolsmethods.springernature.com\/posts\/atoms-grow-where-desired\">https:\/\/protocolsmethods.springernature.com\/posts\/atoms-grow-where-desired<\/a>\uff09<\/figcaption><\/figure><\/div>\n\n\n<p>\u76f8\u5173\u8bba\u6587\u4ee5\u300a\u901a\u8fc7\u6c27\u5316\u8fd8\u539f\u8026\u5408\u7684\u56fa\u6709\u9009\u62e9\u6027\u539f\u5b50\u5c42\u6c89\u79ef\u65b9\u6cd5\u5b9e\u73b0\u6c27\u5316\u94bd\u8584\u819c\u5728Cu\/SiO<sub>2<\/sub>\u8868\u9762\u7684\u81ea\u5bf9\u51c6\u56fe\u6848\u5316\u5236\u9020\u300b\uff08<a href=\"https:\/\/doi.org\/10.1038\/s41467-023-40249-2\">Self-Aligned Patterning of Tantalum Oxide on Cu\/SiO<sub>2<\/sub> through Redox-coupled Inherently Selective Atomic Layer Deposition<\/a>\uff09\u4e3a\u9898\u53d1\u8868\u5728<em>Nature Communications<\/em>\u4e0a\u3002\u534e\u4e2d\u79d1\u6280\u5927\u5b66\u674e\u6613\u8bda\u535a\u58eb\u3001\u535a\u58eb\u751f\u9f50\u5b50\u5ec9\u4e3a\u8bba\u6587\u5171\u540c\u7b2c\u4e00\u4f5c\u8005\uff0c\u9648\u84c9\u6559\u6388\u3001\u66f9\u5764\u526f\u6559\u6388\u4e3a\u8be5\u8bba\u6587\u5171\u540c\u901a\u8baf\u4f5c\u8005\u3002\u534e\u4e2d\u79d1\u6280\u5927\u5b66\u4e3a\u8bba\u6587\u7b2c\u4e00\u5b8c\u6210\u5355\u4f4d\uff0c\u6e56\u5317\u6c5f\u57ce\u5b9e\u9a8c\u5ba4\u4e3a\u5408\u4f5c\u5355\u4f4d\uff08\u56fe2\uff09<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><a href=\"\/\/www.progesta-pro.com\/wp-content\/uploads\/2023\/08\/image-1.png\" class=\"pirobox_gall\"><img loading=\"lazy\" decoding=\"async\" width=\"554\" height=\"312\" src=\"\/\/www.progesta-pro.com\/wp-content\/uploads\/2023\/08\/image-1.png\" alt=\"\" class=\"wp-image-6983\" srcset=\"\/\/www.progesta-pro.com\/wp-content\/uploads\/2023\/08\/image-1.png 554w, \/\/www.progesta-pro.com\/wp-content\/uploads\/2023\/08\/image-1-300x169.png 300w\" sizes=\"(max-width: 554px) 100vw, 554px\" \/><\/a><figcaption class=\"wp-element-caption\">\u56fe2\u7814\u7a76\u5de5\u4f5c\u8bba\u6587\uff08\u6765\u6e90\uff1a<em>Nature Communications<\/em>\uff09<\/figcaption><\/figure><\/div>\n\n\n<p>\u672c\u5de5\u4f5c\u53d1\u73b0\u94dc\u8868\u9762\u4e0d\u540c\u6c27\u5316\u72b6\u6001\u4f1a\u9020\u6210\u975e\u751f\u957f\u533a\u8868\u9762\u5f62\u6210\u7f3a\u9677\u4f4d\u70b9\uff0c\u8fd9\u4e9b\u5f62\u6838\u7f3a\u9677\u5bfc\u81f4\u4e86\u9009\u62e9\u6027\u7684\u4e27\u5931\u3002\u7814\u7a76\u56e2\u961f\u7a81\u7834\u4e86\u5e38\u89c4ALD\u4e24\u6b65\u5faa\u73af\u4ea4\u66ff\u751f\u957f\uff0c\u589e\u52a0\u4e86\u539f\u4f4d\u8fd8\u539f\u4fee\u6b63\u6b65\u9aa4\uff0c\u63d0\u51fa\u7684\u201c\u5faa\u73af\u8026\u5408\u201d\u5de5\u827a\uff0c\u4f7f\u4f20\u7edfAB\u53cc\u5faa\u73af\u8f6c\u53d8\u4e3aABC\u591a\u5faa\u73af\u8026\u5408\uff0c\u8fdb\u800c\u80fd\u591f\u5b9e\u73b0\u8868\u9762\u539f\u4f4d\u8fd8\u539f-\u751f\u957f-\u7f3a\u9677\u53bb\u9664\u7684\u6b65\u9aa4\uff0c\u6709\u6548\u6291\u5236\u94dc\u8868\u9762\u7f3a\u9677\u5f62\u6838\u4ea7\u751f\uff0c\u6700\u7ec8\u5b9e\u73b0\u9ad8\u7cbe\u5ea6\u81ea\u5bf9\u51c6\u3002<\/p>\n\n\n\n<p>\u5728\u539f\u5b50\u6c89\u79ef\u9886\u57df\u8981\u60f3\u5b9e\u73b0\u201c\u9009\u62e9\u6027\u201d\uff0c\u4e00\u822c\u6765\u8bf4\uff0c\u9700\u8981\u5728\u975e\u751f\u957f\u533a\u5236\u5907\u963b\u6321\u5c42\u3002\u4f8b\u5982\uff0c\u5f15\u5165\u81ea\u7ec4\u88c5\u5206\u5b50\u4f7f\u5176\u5728\u975e\u751f\u957f\u533a\u949d\u5316\uff0c\u963b\u6321\u539f\u5b50\u5c42\u6c89\u79ef\u751f\u957f\uff0c\u6700\u540e\u518d\u5c06\u8868\u9762\u7684\u963b\u6321\u5c42\u53bb\u6389\u3002\u800c\u672c\u5de5\u4f5c\u53d1\u5c55\u7684\u56fa\u6709\u9009\u62e9\u6027\uff0c\u5177\u6709\u5168\u6c14\u76f8\u5de5\u827a\u6d41\u7a0b\uff0c\u4e00\u6b65\u6cd5\u5b9e\u73b0\u81ea\u5bf9\u51c6\u6c89\u79ef\uff0c\u65e0\u9700\u963b\u6321\u5242\u751f\u957f\u3001\u53bb\u9664\u7b49\u6b65\u9aa4\uff0c\u66f4\u52a0\u7b80\u6d01\u4e0e\u53ef\u9760\u3002\u8be5\u7814\u7a76\u76f8\u5f53\u4e8e\u5f00\u8f9f\u4e86\u4e00\u4e2a\u65b0\u7684\u65b9\u5411\uff0c\u5229\u7528\u8868\u9762\u7684\u5dee\u5f02\uff0c\u5728\u4e0d\u6dfb\u52a0\u4efb\u4f55\u963b\u6321\u5242\u7684\u6761\u4ef6\u4e0b\uff0c\u9760\u524d\u9a71\u4f53\u7684\u9009\u62e9\u548c\u5de5\u827a\u52a8\u529b\u5b66\u8c03\u63a7\u5b9e\u73b0\u4e86\u65e0\u6a21\u677f\u3001\u65e0\u963b\u6321\u5242\u7684\u9009\u62e9\u6027\u751f\u957f\uff0c\u5373\u901a\u8fc7\u672c\u5f81\u7684\u56fa\u6709\u9009\u62e9\u6027\u5b9e\u73b0\u4e86\u5f62\u6838\u5ef6\u8fdf\u548c\u9ad8\u9009\u62e9\u6027\u81ea\u5bf9\u51c6\u6c89\u79ef\u3002\u5728\u8be5\u7814\u7a76\u4e2d\uff0c\u539f\u5b50\u6c89\u79ef\u6280\u672f\u5de5\u827a\u7684\u81ea\u5bf9\u51c6\u9009\u62e9\u6027\u63a5\u8fd1100%\uff0c\u751f\u957f\u533a\u819c\u539a\u8fbe\u52305nm\uff0c\u975e\u751f\u957f\u533a\u5b8c\u5168\u65e0\u751f\u957f\uff0c\u8fbe\u5230\u56fa\u6709\u9009\u62e9\u6027\u7814\u7a76\u4e2d\u6240\u89c1\u62a5\u9053\u6700\u9ad8\u503c\u3002\uff08\u56fe3\uff09\u5728\u82af\u7247\u5236\u7a0b\u4e2d\uff0c\u53e6\u4e00\u4e2a\u5f88\u91cd\u8981\u7684\u95ee\u9898\u662f\uff0c\u751f\u957f\u7684\u819c\u4f1a\u51fa\u73b0\u201c\u6a2a\u5411\u6269\u5c55\u201d\u73b0\u8c61\uff0c\u5373\u8584\u819c\u5f80\u57fa\u5e95\u5782\u76f4\u65b9\u5411\u751f\u957f\uff0c\u53c8\u4f1a\u5f80\u4e24\u4fa7\u6a2a\u5411\u751f\u957f\uff0c\u5bfc\u81f4\u5b83\u4eec\u4f1a\u6269\u6563\u6269\u5c55\u5230\u94dc\u533a\u57df\u4ece\u800c\u964d\u4f4e\u81ea\u5bf9\u51c6\u5de5\u827a\u53ef\u9760\u6027\u3002\u5728\u8be5\u7814\u7a76\u4e2d\uff0c\u4e0d\u4ec5\u5b9e\u73b0\u4e86\u975e\u751f\u957f\u533a\u94dc\u8868\u9762\u65e0\u751f\u957f\uff0c\u800c\u4e14\u6291\u5236\u4f4f\u4e86\u751f\u957f\u533a\u6c89\u79ef\u8584\u819c\u7684\u8fb9\u7f18\u6269\u5c55\uff0c\u8584\u819c\u751f\u957f\u505c\u6b62\u5230\u94dc\u8fb9\u7f18\u3002\u8fd9\u5bf9\u4e8e\u8fdb\u4e00\u6b65\u63d0\u5347\u5bf9\u51c6\u7cbe\u5ea6\uff0c\u4ee5\u53ca\u964d\u4f4e\u5bf9\u51c6\u5de5\u827a\u540e\u9020\u6210\u7684\u91d1\u5c5e\u7535\u963b\u4e0a\u5347\u5177\u6709\u975e\u5e38\u91cd\u8981\u7684\u4f5c\u7528\u3002<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><a href=\"\/\/www.progesta-pro.com\/wp-content\/uploads\/2023\/08\/image-2.png\" class=\"pirobox_gall\"><img loading=\"lazy\" decoding=\"async\" width=\"554\" height=\"451\" src=\"\/\/www.progesta-pro.com\/wp-content\/uploads\/2023\/08\/image-2.png\" alt=\"\" class=\"wp-image-6984\" srcset=\"\/\/www.progesta-pro.com\/wp-content\/uploads\/2023\/08\/image-2.png 554w, \/\/www.progesta-pro.com\/wp-content\/uploads\/2023\/08\/image-2-300x244.png 300w\" sizes=\"(max-width: 554px) 100vw, 554px\" \/><\/a><figcaption class=\"wp-element-caption\">\u56fe3\u5728\u82af\u7247\u7ed3\u6784\u7247\u4e92\u8054\u5c42\u8868\u9762\u5b9e\u73b0\u8584\u819c\u81ea\u5bf9\u51c6\u6c89\u79ef\uff08\u6837\u54c1\u6765\u6e90\uff1a\u6e56\u5317\u6c5f\u57ce\u5b9e\u9a8c\u5ba4\uff0c\u56fe\u7247\u6765\u6e90\uff1a<em>Nature Communications<\/em>\uff09<\/figcaption><\/figure><\/div>\n\n\n<p>\u8fdb\u4e00\u6b65\uff0c\u56e2\u961f\u5c06\u7ee7\u7eed\u5f00\u53d1\u5148\u8fdb\u9009\u62e9\u6027ALD\u6280\u672f\uff0c\u53d1\u5c55\u4f4e\u4ecb\u7535\u5e38\u6570\u8584\u819c\u9009\u62e9\u6027\u6c89\u79ef\u5de5\u827a\uff0c\u53d1\u5c55\u524d\u9053\u63a5\u89e6\u3001\u540e\u9053\u4e92\u8054\u7684\u91d1\u5c5e-\u91d1\u5c5e\u81ea\u5bf9\u51c6\u5de5\u827a\uff0c\u5e76\u6269\u5c55\u56fa\u6709\u9009\u62e9\u6027\u65b9\u6cd5\u5230\u82af\u7247\u5404\u5c42\u5bf9\u51c6\u5de5\u827a\u5f62\u6210\u5b8c\u6574\u7684\u5de5\u827a\u5305\u3002\u53e6\u4e00\u65b9\u9762\uff0c\u5f00\u53d1\u5c0f\u5206\u5b50\u949d\u5316\u3001\u539f\u4f4d\u7f3a\u9677\u6d88\u9664\u7b49\u5168\u6c14\u76f8\u9009\u62e9\u6027\u6c89\u79ef\u6280\u672f\u8def\u7ebf\uff1b\u4e3a\u4e86\u5c06\u5de5\u827a\u5728\u4ea7\u7ebf\u4e0a\u9a8c\u8bc1\uff0c\u7814\u7a76\u56e2\u961f\u5728\u56fd\u5bb6\u91cd\u70b9\u7814\u53d1\u8ba1\u5212\u98a0\u8986\u6027\u6280\u672f\u521b\u65b0\u91cd\u70b9\u4e13\u9879\u9879\u76ee\u201c\u9762\u5411\u82af\u7247\u5148\u8fdb\u5236\u7a0b\u7684\u9009\u62e9\u6027\u539f\u5b50\u5c42\u6c89\u79ef\u5de5\u827a\u4e0e\u88c5\u5907\u7814\u53d1\u201d\u652f\u6301\u4e0b\uff0c\u4e5f\u6b63\u5728\u5f00\u53d1\u9009\u62e9\u6027\u6c89\u79ef\u8bbe\u5907\uff0c\u5c06\u8be5\u9879\u6280\u672f\u7ee7\u7eed\u5411\u5b9e\u9645\u5e94\u7528\u63a8\u8fdb\u3002<\/p>\n\n\n\n<p>\u8bba\u6587\u94fe\u63a5\uff1a<a href=\"https:\/\/doi.org\/10.1038\/s41467-023-40249-2\">https:\/\/doi.org\/10.1038\/s41467-023-40249-2<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u968f\u7740\u96c6\u6210\u7535\u8def\u5236\u9020\u6280\u672f\u7684\u53d1\u5c55\u548c\u5e02\u573a\u9700\u6c42\uff0c\u82af\u7247\u7279\u5f81\u5c3a\u5bf8\u7f29\u5c0f\uff0c\u4e92\u8fde\u5bc6\u5ea6\u8fdb\u4e00\u6b65\u63d0\u5347\uff0c\u82af\u7247\u7684\u81ea\u5bf9\u51c6\u5236\u9020\u9700\u4f9d\u8d56\u591a\u6b21\u6c89\u79ef-\u5149 [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[9],"tags":[],"_links":{"self":[{"href":"\/\/www.progesta-pro.com\/wp-json\/wp\/v2\/posts\/6981"}],"collection":[{"href":"\/\/www.progesta-pro.com\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"\/\/www.progesta-pro.com\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"\/\/www.progesta-pro.com\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"\/\/www.progesta-pro.com\/wp-json\/wp\/v2\/comments?post=6981"}],"version-history":[{"count":3,"href":"\/\/www.progesta-pro.com\/wp-json\/wp\/v2\/posts\/6981\/revisions"}],"predecessor-version":[{"id":6991,"href":"\/\/www.progesta-pro.com\/wp-json\/wp\/v2\/posts\/6981\/revisions\/6991"}],"wp:attachment":[{"href":"\/\/www.progesta-pro.com\/wp-json\/wp\/v2\/media?parent=6981"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"\/\/www.progesta-pro.com\/wp-json\/wp\/v2\/categories?post=6981"},{"taxonomy":"post_tag","embeddable":true,"href":"\/\/www.progesta-pro.com\/wp-json\/wp\/v2\/tags?post=6981"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}